Equipment in Institute of Physics


  • High resolution analytical transmission microscope (HR-TEM) FEI Titan Themis 200
  • Electron beam litography complex with Raith Elphy Quantum nanopatterning attachment coupled with FEI Helios NanoLab 600 scanning electron microscope
  • Photolitography complex with Heidelberg Instruments μMLA maskless aligner
  • Micromechanical testing with Bruker Hysitron TI 980 TriboIndenter
  • Profilometer Bruker DektakXT Stylus Profiler
  • Wire bonder 53XX BDA (F&S Bondtec Semiconductor GmbH)

More information:


Laboratory of Biophysics

  • Picosecond fluorescence spectrochronograph
  • Selective spectroscopy setup
  • Microspectroscopy setup
  • Circular dichroism (CD) spectrometry

More information: Arvi Freiberg (


Laboratory of Thin Film Technology

  • Atomic layer deposition device; Picosun R200 (Picosun)
  • Chemical Vapor Deposition device (homemade)
  • Devices for preparing of metallic- and nonmetallic films (e-beam, thermal, magnetron)
  • SmartLab X-ray diffractometer (Rigaku)
  • X-ray fluorecent spectrometer ZSX-400(Rigaku)
  • Cascade Microtech probe station measuring set based on MPS150 (Beaverton)
  • Spectrosycopic ellipsometer GES-5E (Semilab)

More information: Aile Tamm (


Laboratory of Physics of Nanostructures

  • Scanning electron microscope Nova NanoSEM 450 (FEI)
  • Scanning electron microscope Vega II SBU (Tescan)
  • Atomic Force Microscope Dimension Edge (Veeco)
  • Buehler Beta Grinder Polisher

More information: Rünno Lõhmus (


Laboratory of Laser spectroscopy

  • Renishaw MikroRaman spectrometer
  • Spectrofotometer Jasco V-570
  • Spectrofluorometer FluoroMax-4P

More information: Sven Lange (


Laboratory of X-ray Spectroscopy

  • X-ray photoelectron spectroscopy (XPS) measurement setup
  • UV-Vis spectrometer Cary 5000
  • FTIR spectrometer Vertex 70
  • DLS Malvern Zetasizer Nano ZSP
  • Environmental chamber Memmert CTC 256

More information: Vambola Kisand (


Laboratory of Sensor Technology

  • Setup for electrical and optical gas sensor characterization
  • Setup for pulsed laser deposition of thin films

More information: Raivo Jaaniso (


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