Namur+
- High resolution analytical transmission microscope (HR-TEM) FEI Titan Themis 200
- Electron beam litography complex with Raith Elphy Quantum nanopatterning attachment coupled with FEI Helios NanoLab 600 scanning electron microscope
- Photolitography complex with Heidelberg Instruments μMLA maskless aligner
- Micromechanical testing with Bruker Hysitron TI 980 TriboIndenter
- Profilometer Bruker DektakXT Stylus Profiler
- Wire bonder 53XX BDA (F&S Bondtec Semiconductor GmbH)
More information: https://namurplus.ut.ee/
Laboratory of Biophysics
- Picosecond fluorescence spectrochronograph
- Selective spectroscopy setup
- Microspectroscopy setup
- Circular dichroism (CD) spectrometry
More information: Arvi Freiberg (arvi.freiberg@ut.ee)
https://fi.ut.ee/en/sisu/biofuusika-labor
Laboratory of Thin Film Technology
- Atomic layer deposition device; Picosun R200 (Picosun)
- Chemical Vapor Deposition device (homemade)
- Devices for preparing of metallic- and nonmetallic films (e-beam, thermal, magnetron)
- SmartLab X-ray diffractometer (Rigaku)
- X-ray fluorecent spectrometer ZSX-400(Rigaku)
- Cascade Microtech probe station measuring set based on MPS150 (Beaverton)
- Spectrosycopic ellipsometer GES-5E (Semilab)
More information: Aile Tamm (aile.tamm@ut.ee)
https://fi.ut.ee/en/content/laboratory-thin-film-technology
Laboratory of Physics of Nanostructures
- Scanning electron microscope Nova NanoSEM 450 (FEI)
- Scanning electron microscope Vega II SBU (Tescan)
- Atomic Force Microscope Dimension Edge (Veeco)
- Buehler Beta Grinder Polisher
More information: Rünno Lõhmus (runno.lohmus@ut.ee)
https://fi.ut.ee/en/node/113990
Laboratory of Laser spectroscopy
- Renishaw MikroRaman spectrometer
- Spectrofotometer Jasco V-570
- Spectrofluorometer FluoroMax-4P
More information: Sven Lange (sven.lange@ut.ee)
Laboratory of X-ray Spectroscopy
- X-ray photoelectron spectroscopy (XPS) measurement setup
- UV-Vis spectrometer Cary 5000
- FTIR spectrometer Vertex 70
- DLS Malvern Zetasizer Nano ZSP
- Environmental chamber Memmert CTC 256
More information: Vambola Kisand (vambola.kisand@ut.ee)
Laboratory of Sensor Technology
- Setup for electrical and optical gas sensor characterization
- Setup for pulsed laser deposition of thin films
More information: Raivo Jaaniso (raivo.jaaniso@ut.ee)
https://fi.ut.ee/en/node/112644